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HomeSolid State PhenomenaSolid State Phenomena Vols. 78-79Formation of Silicon Nanoclusters in Silicon Oxide...

Formation of Silicon Nanoclusters in Silicon Oxide Using an Electron Beam

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Periodical:

Solid State Phenomena (Volumes 78-79)

Pages:

349-356

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.78-79.349

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Online since:

April 2001

Authors:

M.V. Zamoryanskaya, V.I. Sokolov, Alla A. Sitnikova

Keywords:

Cathodoluminescence, Electrons Beam, Modification of Silicon Oxide, Silicon Nanoclusters

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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