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HomeSolid State PhenomenaSolid State Phenomena Vols. 78-79Assessment of Radiation Induced Lattice Defects in...

Assessment of Radiation Induced Lattice Defects in Shallow Trench Isolation Diodes Irradiated by Neutron

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Beam Injection Assessment of Microstructures in Semiconductors

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Periodical:

Solid State Phenomena (Volumes 78-79)

Pages:

357-366

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.78-79.357

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Online since:

April 2001

Authors:

K. Kobayashi, H. Ohyama, K. Hayama, Y. Takami, Eddy Simoen, A. Poyai, Cor Claeys, A. Mohammadzadeh, S. Kohiki

Keywords:

DLTS, Electron, Irradiation, Lattice Defect, Neutron, Shallow Trench Isolation, STI

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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