Influence of Ion Beam Irradiation on Solid-Phase Regrowth of Amorphous Si on SiO2

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 78-79)

Edited by:

H. Tomokage and T. Sekiguchi

Pages:

345-348

DOI:

10.4028/www.scientific.net/SSP.78-79.345

Citation:

I. Tsunoda et al., "Influence of Ion Beam Irradiation on Solid-Phase Regrowth of Amorphous Si on SiO2", Solid State Phenomena, Vols. 78-79, pp. 345-348, 2001

Online since:

April 2001

Export:

Price:

$35.00

In order to see related information, you need to Login.