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HomeSolid State PhenomenaSolid State Phenomena Vols. 78-79Influence of Ion Beam Irradiation on Solid-Phase...

Influence of Ion Beam Irradiation on Solid-Phase Regrowth of Amorphous Si on SiO₂

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Periodical:

Solid State Phenomena (Volumes 78-79)

Pages:

345-348

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.78-79.345

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Online since:

April 2001

Authors:

I. Tsunoda, T. Nagata, Taizoh Sadoh, A. Kenjo, Masanobu Miyao

Keywords:

Amorphous Si, Ion-Beam Irradiation, SiO₂, Solid-Phase Crystallization

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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