Poly-Crystallized SiGe Thin Films in a Low-Temperature Process
p.83
p.83
Effect of Pressure and Temperature on the Electrical Properties of LPCVD Silicon-Germanium Thin Films
p.89
p.89
Intra-Grain Defects - Limiting Factor for Low-Temperature Polycrystalline Silicon Films?
p.95
p.95
Structural Effects in Ultra-Thin Iridium Silicide
p.101
p.101
Hydrogen Diffusion through Deformed Si-Si Bonds at Grain Boundaries in Hot-Wire CVD Polycrystalline Silicon Films
p.109
p.109
Point Defects in Carbon-Rich Polycrystalline Silicon
p.115
p.115
Hydrogen Penetration into Si under Wet Chemical Etching: Experiment and Simulation
p.121
p.121
Comparison of Deposited Polycrystalline Films and Crystallized Silicon from a-Si:H Films
p.127
p.127
Visible Electroluminescence from an ITO/ZnS:Mn/n-Si Device
p.133
p.133
Hydrogen Diffusion through Deformed Si-Si Bonds at Grain Boundaries in Hot-Wire CVD Polycrystalline Silicon Films
Abstract:
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Periodical:
Solid State Phenomena (Volumes 80-81)
Pages:
109-114
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Online since:
November 2001
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© 2001 Trans Tech Publications Ltd. All Rights Reserved
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