Vibrational Modes of Oxygen Dimers in Germanium
p.105
p.105
Oxygen Precipitation in Silicon Doped with Tin
p.111
p.111
Hydrostatic Pressure Effect on Redistribution of Oxygen Atoms in Oxygen-Implanted Silicon
p.115
p.115
Elastic Instability of Strained Spherical Precipitates as a Cause of Oxide Platelets in Silicon
p.121
p.121
Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing
p.127
p.127
Hydrogen Interaction with Transition Metals in Silicon, Studied by Electron Paramagnetic Resonance
p.133
p.133
Raman Spectroscopic Analysis of Hydrogen Plasma Treated Czochralski Silicon
p.139
p.139
Nitrogen Effect on Hydrogen Penetration into Cz Si during Wet Chemical Etching
p.145
p.145
Hydrogen-Related Defects in High-Resistivity Silicon
p.150
p.150
Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing
Abstract:
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Periodical:
Solid State Phenomena (Volumes 82-84)
Pages:
127-132
Citation:
Online since:
November 2001
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Сopyright:
© 2002 Trans Tech Publications Ltd. All Rights Reserved
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