Elastic Instability of Strained Spherical Precipitates as a Cause of Oxide Platelets in Silicon
p.121
p.121
Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing
p.127
p.127
Hydrogen Interaction with Transition Metals in Silicon, Studied by Electron Paramagnetic Resonance
p.133
p.133
Raman Spectroscopic Analysis of Hydrogen Plasma Treated Czochralski Silicon
p.139
p.139
Nitrogen Effect on Hydrogen Penetration into Cz Si during Wet Chemical Etching
p.145
p.145
Hydrogen-Related Defects in High-Resistivity Silicon
p.150
p.150
Infra Red Absorption by Hydrogen-Passivated Cracks in Silicon
p.155
p.155
Atomistic Study of Boron Clustering in Silicon
p.163
p.163
Self-Interstitial Kinetics and Transient Phenomena in Si Crystals
p.171
p.171
Nitrogen Effect on Hydrogen Penetration into Cz Si during Wet Chemical Etching
Abstract:
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Periodical:
Solid State Phenomena (Volumes 82-84)
Pages:
145-149
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Online since:
November 2001
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© 2002 Trans Tech Publications Ltd. All Rights Reserved
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