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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Raman Spectroscopic Analysis of Hydrogen Plasma...

Raman Spectroscopic Analysis of Hydrogen Plasma Treated Czochralski Silicon

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

139-144

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.139

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Online since:

November 2001

Authors:

Reinhart Job, Alexander G. Ulyashin, Wolfgang R. Fahrner

Keywords:

Annealing, Hydrogen in Silicon, Hydrogen Molecules, Hydrogen Plasma Treatments, Platelets, Raman Spectroscopy, Si-H-Bonds, Void

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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