Investigating Post CMP Cleaning Processes for STI Ceria Slurries

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

63-68

DOI:

10.4028/www.scientific.net/SSP.92.63

Citation:

R. Small et al., "Investigating Post CMP Cleaning Processes for STI Ceria Slurries", Solid State Phenomena, Vol. 92, pp. 63-68, 2003

Online since:

May 2003

Export:

Price:

$35.00

In order to see related information, you need to Login.