Single Wafer Immersion Process Incorporating a Novel Megasonics Configuration with an Advanced IPA Vapor Condensation Dry

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

45-48

DOI:

10.4028/www.scientific.net/SSP.92.45

Citation:

J.J. Rosato et al., "Single Wafer Immersion Process Incorporating a Novel Megasonics Configuration with an Advanced IPA Vapor Condensation Dry", Solid State Phenomena, Vol. 92, pp. 45-48, 2003

Online since:

May 2003

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Price:

$35.00

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