Paper Titles

Behaviour of High-k Dielectric Materials with Classical Cleaning Chemistries
p.15

Introduction of High-k Materials into Wet Processing, Analysis and Behavior
p.19

Metallic Impurity Contamination from Tungsten Gate Cleaning
p.23

Single Chemistry Cleaning Solutions for Advanced Wafer Cleaning
p.27

Single Chemistry Cleaning with Complexing Agents (CAs): Determination of CA-Lifetimes by UV/VIS-Spectroscopy
p.33

Complexing Agents Employed in Single Chemistry Cleaning: Stability Studies Using HPLC
p.37

Stability and Residue Studies of Complexing Agents in SC-1 Bath
p.41

Single Wafer Immersion Process Incorporating a Novel Megasonics Configuration with an Advanced IPA Vapor Condensation Dry
p.45

Metallic Contamination Removal Evaluation for Single Wafer Processing
p.49

HomeSolid State PhenomenaSolid State Phenomena Vol. 92Single Chemistry Cleaning with Complexing Agents...

Single Chemistry Cleaning with Complexing Agents (CAs): Determination of CA-Lifetimes by UV/VIS-Spectroscopy

Article Preview

Abstract:

You might also be interested in these eBooks

Ultra Clean Processing of Silicon Surfaces VI

Info:

Periodical:

Solid State Phenomena (Volume 92)

Pages:

33-36

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92.33

Citation:

Cite this paper

Online since:

May 2003

Authors:

O. Doll, Bernd O. Kolbesen

Keywords:

CA-Lifetime, Complexing Agent, Single Chemistry Cleaning, UV-VIS Spectroscopy

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2003 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: