A New Industrial Etching & Drying Process for MEMS to Prevent Collapse of Microstructures

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

73-76

DOI:

10.4028/www.scientific.net/SSP.92.73

Citation:

O. Raccurt et al., "A New Industrial Etching & Drying Process for MEMS to Prevent Collapse of Microstructures", Solid State Phenomena, Vol. 92, pp. 73-76, 2003

Online since:

May 2003

Export:

Price:

$35.00

In order to see related information, you need to Login.