Processing and Characterization of 300 mm Argon-Annealed Wafers

Abstract:

• Periodical: Solid State Phenomena (Volumes 95-96)
• Pages: 105-110
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.95-96.105
• Online since: September 2003
• Authors: Timo Müller, E. Daub, H. Yokota, R. Wahlich, P. Krottenthaler, Wilfried von Ammon
• Keywords: Argon Anneal, Nitrogen Doping, OPP, Pulling Conditions, Slip

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