Oxygen Ion Bombardment for Local Oxide Formation in Si

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Periodical:

Solid State Phenomena (Volumes 95-96)

Edited by:

H. Richter and M. Kittler

Pages:

77-82

DOI:

10.4028/www.scientific.net/SSP.95-96.77

Citation:

D. Krüger et al., "Oxygen Ion Bombardment for Local Oxide Formation in Si", Solid State Phenomena, Vols. 95-96, pp. 77-82, 2004

Online since:

September 2003

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$35.00

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