Vibrational Lifetimes of Hydrogen and Silicon MOSFET Reliability

Abstract:

• Periodical: Solid State Phenomena (Volumes 95-96)
• Pages: 123-128
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.95-96.123
• Online since: September 2003
• Authors: Leonard C. Feldman, G. Lüpke, N.H. Tolk
• Keywords: Reliability, Si-H Defects

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