Depth Resolved Defect Analysis by Micro-Raman Investigations of Plasma Hydrogenated Czochralski Silicon Wafers

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Periodical:

Solid State Phenomena (Volumes 95-96)

Edited by:

H. Richter and M. Kittler

Pages:

141-148

DOI:

10.4028/www.scientific.net/SSP.95-96.141

Citation:

R. Job et al., "Depth Resolved Defect Analysis by Micro-Raman Investigations of Plasma Hydrogenated Czochralski Silicon Wafers", Solid State Phenomena, Vols. 95-96, pp. 141-148, 2004

Online since:

September 2003

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$35.00

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