Nitrogen Out-Diffusion from Czochralski Silicon Monitored by Depth Profiles of Shallow Thermal Donors

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Periodical:

Solid State Phenomena (Volumes 95-96)

Edited by:

H. Richter and M. Kittler

Pages:

117-122

DOI:

10.4028/www.scientific.net/SSP.95-96.117

Citation:

V. V. Voronkov et al., "Nitrogen Out-Diffusion from Czochralski Silicon Monitored by Depth Profiles of Shallow Thermal Donors ", Solid State Phenomena, Vols. 95-96, pp. 117-122, 2004

Online since:

September 2003

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$35.00

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