Tuning Oxygen Concentration at Low and High Temperature IG Process and Boron Concentration in Epitaxial Wafer for the Gettering of Metal Impurities

Abstract:

• Periodical: Solid State Phenomena (Volumes 95-96)
• Pages: 539-546
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.95-96.539
• Online since: September 2003
• Authors: Mohammad B. Shabani, Y. Shiina, Y. Shimanuki
• Keywords: Atomic Absorption Spectroscopy, Bone Mineral Density (BMD), Boron Gettering, Copper (Cu), Denuded Zone, Gettering Efficiency, Internal Gettering, Iron, Nickel Ni, Oxide Precipitate

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