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HomeSolid State PhenomenaSolid State Phenomena Vols. 95-96Gettering Strategies for SOI Wafers

Gettering Strategies for SOI Wafers

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Gettering and Defect Engineering in Semiconductor Technology X

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Periodical:

Solid State Phenomena (Volumes 95-96)

Pages:

547-552

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.95-96.547

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Online since:

September 2003

Authors:

Andrei A. Istratov, W. Huber, Eicke R. Weber

Keywords:

Gettering, Iron, Poly-Silicon, Silicon Dioxide, SOI

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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