The special edition includes articles that represented the latest research results and engineering solutions in the area of electronic device design and production. This special edition will be interesting to specialists in semiconductor power device production, microelectronics and optoelectronics.

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Info:

eBook:

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ToC:

Table of contents

Editors:

Dr. Juraj Marek, Dr. Gregor Pobegen, Prof. Ulrike Grossner and Dr. Hock Jin Quah

DOI:

https://doi.org/10.4028/b-CGHfE9

THEMA:

PDT, TGM, TJ

BISAC:

SCI050000, TEC008000, TEC021000

Keywords:

Chemical Mechanical Polishing, Crystal Growth, Defect, Doping, Electronic Packaging, Epitaxial Growth, Etching, Integrated Circuits, Interconnector, Interfacial Delamination, Ion Implantation, Metal Oxide Semiconductor, Optoelectronics, Physical Vapor Deposition, Quantum Well, Sensor, Silicon Carbide, Surface Damage, Wafer, Wire Bonding

Details:

Special topic volume with invited peer-reviewed papers only

Pages:

122

Year:

2023

ISBN-13 (softcover):

9783036403250

ISBN-13 (eBook):

9783036413259

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Ringgold Subjects:

Materials Science, Electronics, Nanoscience