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Effect of Conditioning Parameters on Surface Non-Uniformity of Polishing Pad in Chemical Mechanical Planarization
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Effect of Polishing Time and Pressure on Polishing Pad Performance
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Scale Effect of Nano-Indentation of Silicon – A Molecular Dynamics Investigation
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Scale Effect of Nano-Indentation of Silicon – A Molecular Dynamics Investigation

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Abstract:

This paper investigates the scale effect of indenter tip radius on the deformation of silicon under nanoindentation using molecular dynamics simulation. It was found that with larger diamond tips a six-coordinated silicon phase different from β-silicon on loading and a diamond like crystal beneath the indenter on unloading would appear as a result of the indentation stressing. This is a new phenomenon that has not been observed previously.

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Advances in Abrasive Technology XI View Preview

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Periodical:

Key Engineering Materials (Volumes 389-390)

Pages:

521-526

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.389-390.521

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Online since:

September 2008

Authors:

Kausala Mylvaganam, Liang Chi Zhang

Keywords:

Indentation, Molecular Dynamic (MD), Scale Effect, Silicon

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© 2009 Trans Tech Publications Ltd. All Rights Reserved

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