Materials Science Forum

Paper Title	Page
Carbon-Oxygen Complexes and Oxygen Precipitation in Silicon Crystals Observed by Low-Temperature Infrared Absorption Authors: Y. Shirakawa, Hiroshi Yamada-Kaneta, Tomoya Ogawa	201
Shifts of the Infrared Absorption Peaks of Oxygen in Silicon Caused by Germanium-Doping Authors: Hiroshi Yamada-Kaneta, Ch. Kaneta, Tomoya Ogawa	207
Observation of Five Additional Thermal Donors and Kinetics of Thermal Donor Formation and Annihilation at Temperatures above 500°C in Czochralski-Grown Si Authors: W. Götz, Gerhard Pensl, W. Zulehner	213
Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals Authors: A. Hara, M. Aoki, T. Fukuda, A. Ohsawa	219
Formation of Oxygen Clusters in Quenched Cz- and MCz-Si Crystals Authors: Atsushi Ikari, Hiroyo Haga, O. Yoda, Akira Uedono, Yusuke Ujihira	225
Simulation of Oxygen Precipitation and Denuded Zone Formation during Thermal Anneals Authors: M. Schrems	231
Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon Authors: T. Akane, S. Matsumoto, I. Mizushima	237
Heavily Arsenic Doping into Si by ArF Excimer Laser Irradiation Using Tertiarybutylarsine (tBAs) Authors: Shigefusa F. Chichibu, T. Nii, T. Akane, S. Matsumoto	243
Effective-Mass-Like Excited Pseudo-Donor States of a Complex Metastable Defect in Silicon Authors: J.H. Svensson, Erik Janzén, Olof Kordina, Bo Monemar	249
Zeeman Study of 735meV Photoluminescence Band in Iron-Doped Silicon Authors: M.I. Càlao, M. Celeste Carmo	255

Paper Title

Page

Carbon-Oxygen Complexes and Oxygen Precipitation in Silicon Crystals Observed by Low-Temperature Infrared Absorption

Authors: Y. Shirakawa, Hiroshi Yamada-Kaneta, Tomoya Ogawa

201

Shifts of the Infrared Absorption Peaks of Oxygen in Silicon Caused by Germanium-Doping

Authors: Hiroshi Yamada-Kaneta, Ch. Kaneta, Tomoya Ogawa

207

Observation of Five Additional Thermal Donors and Kinetics of Thermal Donor Formation and Annihilation at Temperatures above 500°C in Czochralski-Grown Si

Authors: W. Götz, Gerhard Pensl, W. Zulehner

213

Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals

Authors: A. Hara, M. Aoki, T. Fukuda, A. Ohsawa

219

Formation of Oxygen Clusters in Quenched Cz- and MCz-Si Crystals

Authors: Atsushi Ikari, Hiroyo Haga, O. Yoda, Akira Uedono, Yusuke Ujihira

225

Simulation of Oxygen Precipitation and Denuded Zone Formation during Thermal Anneals

Authors: M. Schrems

231

Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon

Authors: T. Akane, S. Matsumoto, I. Mizushima

237

Heavily Arsenic Doping into Si by ArF Excimer Laser Irradiation Using Tertiarybutylarsine (tBAs)

Authors: Shigefusa F. Chichibu, T. Nii, T. Akane, S. Matsumoto

243

Effective-Mass-Like Excited Pseudo-Donor States of a Complex Metastable Defect in Silicon

Authors: J.H. Svensson, Erik Janzén, Olof Kordina, Bo Monemar

249

Zeeman Study of 735meV Photoluminescence Band in Iron-Doped Silicon

Authors: M.I. Càlao, M. Celeste Carmo

255

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