Non-Standard FinFET Devices for Small Volume Sample Sensors
The presented work is focused on development of silicon wire-based MOS devices. .The original fabrication method has been described. Electrical performances of a variety of devices have been measured and evaluated. As these devices will be used as a platform for detectors of biochemical molecules, also tests of device operation oriented towards sensor applications have been done.
Alexei N. Nazarov and Jean-Pierre Raskin
M. Zaborowski et al., "Non-Standard FinFET Devices for Small Volume Sample Sensors", Advanced Materials Research, Vol. 276, pp. 127-135, 2011