Non-Standard FinFET Devices for Small Volume Sample Sensors

Abstract:

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The presented work is focused on development of silicon wire-based MOS devices. .The original fabrication method has been described. Electrical performances of a variety of devices have been measured and evaluated. As these devices will be used as a platform for detectors of biochemical molecules, also tests of device operation oriented towards sensor applications have been done.

Info:

Periodical:

Edited by:

Alexei N. Nazarov and Jean-Pierre Raskin

Pages:

127-135

DOI:

10.4028/www.scientific.net/AMR.276.127

Citation:

M. Zaborowski et al., "Non-Standard FinFET Devices for Small Volume Sample Sensors", Advanced Materials Research, Vol. 276, pp. 127-135, 2011

Online since:

July 2011

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Price:

$35.00

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