Routes towards Novel Active Pressure Sensors in SOI Technology
In this paper, novel pressure sensors approach is proposed and described. Active devices and oscillating circuits are directly integrated on very thin dielectric membranes as pressure transducers. Involved patterning of the membrane is supposed to cause a drop of mechanical robustness. Finite elements simulations are performed in order to better understand stress/strain distribution and as an attempt to explain the early burst of patterned membranes. Smart circuit designs are reported as solutions with high sensitivity and reduced footprint on membranes.
Alexei N. Nazarov and Jean-Pierre Raskin
B. Olbrechts et al., "Routes towards Novel Active Pressure Sensors in SOI Technology", Advanced Materials Research, Vol. 276, pp. 145-155, 2011