Routes towards Novel Active Pressure Sensors in SOI Technology

Abstract:

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In this paper, novel pressure sensors approach is proposed and described. Active devices and oscillating circuits are directly integrated on very thin dielectric membranes as pressure transducers. Involved patterning of the membrane is supposed to cause a drop of mechanical robustness. Finite elements simulations are performed in order to better understand stress/strain distribution and as an attempt to explain the early burst of patterned membranes. Smart circuit designs are reported as solutions with high sensitivity and reduced footprint on membranes.

Info:

Periodical:

Edited by:

Alexei N. Nazarov and Jean-Pierre Raskin

Pages:

145-155

DOI:

10.4028/www.scientific.net/AMR.276.145

Citation:

B. Olbrechts et al., "Routes towards Novel Active Pressure Sensors in SOI Technology", Advanced Materials Research, Vol. 276, pp. 145-155, 2011

Online since:

July 2011

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Price:

$35.00

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