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Comparison of DLC and N-Doped DLC Synthesized by RF-PECVD

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Abstract:

Diamond-like carbon (DLC) films and nitrogen doped DLC (NDLC) were deposited on glass slide and H13 steel by plasma-enhanced chemical vapor deposition using a commercial RF 13.56 MHz (RF-PECVD). The films have been prepared from CH4 for DLC and CH4+N2 mixtures for NDLC. The deposition process was at 300°C under argon atmosphere for 120 min. Bonding energy and diamond like carbon characteristic of DLC and NDLC films have been characterized by Fourier Transform Infrared Spectroscopy (FTIR) and Raman spectroscopy. Thermalgravimetric Analyzer (TGA) was used to evaluate the thermal stability of the films which were scrapped off from a glass slide substrate. The mechanical properties was characterized, such as hardness by nanoindentation technique, scratch test by Rockwell diamond tip in progressive mode and friction coefficient have been measured in ambient air using a ball-on-disk tribometer.

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Periodical:

Advanced Materials Research (Volume 893)

Pages:

528-532

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.893.528

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Online since:

February 2014

Authors:

Witit Janchocktawee, Vishnu Rachpech*, Jessada Wannasin

Keywords:

Diamond-Like Carbon (DLC), Nitrogen-Doped DLC, PECVD

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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