High Heat Treatment Analysis on Ba _0.6Sr _0.4TiO₃ Thin Films

Abstract:

Barium strontium titanate becomes famous among the microelectronic field due to its dielectric properties. Sol-gel method was used to prepare the Ba _0.6Sr _0.4TiO₃ and was deposited on SiO₂ substrate. The temperatures used in the heat treatment process were high temperature, 650°C. For high heat treatment temperature, the process was carried in 2 different times which were 15 min and 60min.The effect of the different temperature and time in the heat treatment process were analysed by using XRD. 650°C for 15 min and 60min, there are clearer peaks observed and the intensity of the 110 peak was sharper.

• Periodical: Advanced Materials Research (Volume 893)
• Pages: 550-553
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.893.550
• Online since: February 2014
• Authors: Vithyacharan Retnasamy*, Zaliman Sauli, They Yee Chin, Loh Sek Nee
• Keywords: Different Temperature, High Heat Treatment, X-Ray Diffraction (XRD)

References

[1] R. Whatmore, 27. Ferroelectric Materials: Springer, (2006).

[2] H. -Y. Tian, et al., Synthesis and characteristics of strontium–barium titanate graded thin films at low temperature using a sol–gel technique, Solid State Communications, vol. 117, pp.315-319, (2001).

DOI: 10.1016/s0038-1098(00)00466-x

[3] R. Nath, et al., Enhanced piezoelectric response from barium strontium titanate multilayer films, Applied Physics Letters, vol. 92, pp.012916-3, (2008).

DOI: 10.1063/1.2825287

[4] D. -Y. Kim, et al., Electro-optic characteristics of (001)-oriented Ba0. 6 Sr0. 4TiO3 thin films, Applied Physics Letters, vol. 82, pp.1455-1457, (2003).

DOI: 10.1063/1.1556962

[5] M. Viviani, et al., Positive Temperature Coefficient of Electrical Resistivity below 150 K in Barium Strontium Titanate, Journal of the American Ceramic Society, vol. 87, pp.756-758, (2004).

DOI: 10.1111/j.1551-2916.2004.00756.x

[6] T. J. Zhang, et al., Optical properties of RF magnetron sputtered Ba0. 65Sr0. 35TiO3 thin films, Ceramics International, vol. 33, pp.723-726, (2007).

DOI: 10.1016/j.ceramint.2005.12.016

[7] Y. Sakabe, et al., Multilayer Ceramic Capacitors with Thin (Ba, Sr)TiO3 Layers by MOCVD, Journal of Electroceramics, vol. 3, pp.115-121, 1999/06/01 (1999).

[8] X. H. Zhu, et al., Enhanced dielectric properties of Mn doped Ba0. 6Sr0. 4TiO3 thin films fabricated by pulsed laser deposition, Materials Letters, vol. 60, pp.1224-1228, (2006).

DOI: 10.1016/j.matlet.2005.11.004

[9] P. Shi, et al., Preparation and properties of (Ba0. 7Sr0. 3)TiO3 thin films by soft-solution processing, Journal of Crystal Growth, vol. 276, pp.97-101, (2005).

DOI: 10.1016/j.jcrysgro.2004.10.061

[10] F. W. a. A. U. a. S. Leppävuori, Preparation and electrical properties of Ba0. 6Sr0. 4TiO3 thin films deposited by the sol-gel method, Physica, vol. 1997, (1997).