Boron Diffusion in Pre-Amorphised Silicon: Interactions with the End of Range Defects

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Periodical:

Defect and Diffusion Forum (Volumes 153-155)

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Edited by:

D.J. Fisher

Pages:

11-24

DOI:

10.4028/www.scientific.net/DDF.153-155.11

Citation:

D. Mathiot et al., "Boron Diffusion in Pre-Amorphised Silicon: Interactions with the End of Range Defects", Defect and Diffusion Forum, Vols. 153-155, pp. 11-24, 1998

Online since:

November 1997

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$35.00

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