Hybrid nanostructured Metal Oxide Semiconductor (MOS) capacitor was fabricated on silicon substrates (n-type) using chemical solution deposition with YMnO3 as an oxide layer. Electrical properties of MOS capacitor have been investigated with frequency dependence capacitance-voltage (C-V) characterization. The surface morphology of deposited layer was studied using the Atomic Force Microscopy (AFM). Hysteresis in the C-V loop and change in the values of Cminimum were described by a charge trap mechanism in the multiferroic oxide layer of MOS devices. While anomalous behavior in saturation capacitance in the inversion as well as in accumulation region and a shift in threshold voltage (VT) were explained in the vicinity of frequency depended Debye length (LDebye).