Rf Sputtering of Composite Fluorocarbon/ZnO Films and their Basic Properties

Yu Hui Zhang; Quan Ji; Xue Wang

doi:10.4028/www.scientific.net/KEM.373-374.159

Paper Titles

Fabrication Of Nd:YVO₄ Thin Film Waveguide Grown on Si/SiO₂ by Pulsed Laser Deposition
p.142

The Preparation and Properties of TiN/Carbon Coatings by Ion Beam Assistant Magnetron Spurting Deposition
p.146

Adhesion Studies of Diamond-Like Carbon Films on 202 Stainless Steel Substrate with a Silicon Interlayer
p.151

Study on Interfacial Bonding Strength of TiN Films Prepared by Magnetron Sputtering at Low Temperature
p.155

Rf Sputtering of Composite Fluorocarbon/ZnO Films and their Basic Properties
p.159

Effect of Yttrium(Y) Content in Al Target on the Thickness of CrAlTiN Film by Magnetron Sputtering
p.163

Effects of Substrate Bias Voltage on the Microstructure of Cr-Al-N Coatings
p.167

Effect of Low-Energy Ion Irradiation on Synthesis of Hard and Superhard Films
p.172

The Microstructure and Properties of CrN_x Films Synthesized by Unbalanced Magnetron Sputtering
p.176

HomeKey Engineering MaterialsKey Engineering Materials Vols. 373-374Rf Sputtering of Composite Fluorocarbon/ZnO Films...

Rf Sputtering of Composite Fluorocarbon/ZnO Films and their Basic Properties

Abstract:

Composite fluorocarbon/ZnO films were deposited by R.F. sputtering using polytetrafluoroethylene (PTFE) and Zn target on polyethylene terephthalate (PET) substrate. Argon was used as the working gas and oxygen as reacting gas. The obtained films were characterized by AFM, UV-visible spectrophotometer, XPS and static contact angle measurements. The composite films are islands-structure composed of nanometer particles. Surface of the islands is not flat. The static contact angle of water is larger than 90°, possessing excellent hydrophobicity. The composite films exhibit multi-enhanced ultraviolet absorption due to π-π-conjugated molecular structure, surface morphology and nano-sized ZnO absorbing effect.