Piezoceramic Stack Actuators for Micropositioning Stage

Ya Nan Xu; Xiang Cheng Chu

doi:10.4028/www.scientific.net/KEM.512-515.1337

Paper Titles

Ferroelectric and Physical Characteristic of the La and V Doped on Bi₄Ti₃O₁₂ Thin Film Prepared by RF Magnetron Sputtering Method
p.1321

Ferroelectric Properties and Microstructures of Tb₄O₇-Doped Bi₄Ti₃O₁₂ Thin Films
p.1325

Electrical Properties and Microstructures of Tb₄O₇-Doped Bi₄Ti₃O₁₂ Ceramics
p.1329

Ferroelectric Properties of Bismuth Titanate Ceramics by Sm³⁺/V⁵⁺ Substitution
p.1333

Piezoceramic Stack Actuators for Micropositioning Stage
p.1337

Damping Properties of Epoxy-Embedded Piezoelectric Composites
p.1342

Microstructure and Electrical Properties of Porous PZT Ceramics with Unidirectional Pore Channel Structure Fabricated by Freeze-Casting
p.1347

Electrical and Physical Properties of Lead-Free (Na_0.5K_0.5)NbO₃- Bi_0.5(Na_0.₉₃K_0.₀₇)_0.5TiO₃ Ceramics
p.1351

Sol-Gel Derived Li₂O Doped BNT-BKT-BT Ceramics: Microstructure and Piezoelectric Properties
p.1355

HomeKey Engineering MaterialsKey Engineering Materials Vols. 512-515Piezoceramic Stack Actuators for Micropositioning...

Piezoceramic Stack Actuators for Micropositioning Stage

Abstract:

Based on piezoceramic stack actuators, a stage (dimension of 50mm×50mm×11mm) with a symmetric displacement magnifying mechanism is studied in this paper. FEM simulations are carried out to reveal the performance of the micropositioning stage and the amplification radio of the flexure hinge is 4.76. The working mode of the flexure hinge of the stage is also simulated by finite element method, and its natural frequency is 3291Hz. A series of tests about piezoceramic stack actuators have been done, including static, dynamic and temperature tests. The experimental results are identical to the theoretical analysis and give help to the application of piezoceramic stack actuators. It can also help the precise micropositioning stage driven by PZT to achieve higher positioning accuracy and resolution.

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Periodical:

Key Engineering Materials (Volumes 512-515)

Pages:

1337-1341

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.512-515.1337

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Online since:

June 2012

Authors:

Ya Nan Xu, Xiang Cheng Chu

Keywords:

Finite Element Method (FEM), Flexure Hinge, Micropositioning Stage, Piezoceramic Stack Actuators

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References

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