Nature and Generation Mechanism of Butterfly-Type Intrinsic Gettering Centers in Oxygen-Free Silicon Crystals

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Periodical:

Materials Science Forum (Volumes 10-12)

Edited by:

H.J. von Bardeleben

Pages:

145-150

DOI:

10.4028/www.scientific.net/MSF.10-12.145

Citation:

O. Ueda et al., "Nature and Generation Mechanism of Butterfly-Type Intrinsic Gettering Centers in Oxygen-Free Silicon Crystals", Materials Science Forum, Vols. 10-12, pp. 145-150, 1986

Online since:

January 1986

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$35.00

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