Nature and Generation Mechanism of Butterfly-Type Intrinsic Gettering Centers in Oxygen-Free Silicon Crystals

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 10-12)

Edited by:

H.J. von Bardeleben

Pages:

145-150

Citation:

O. Ueda et al., "Nature and Generation Mechanism of Butterfly-Type Intrinsic Gettering Centers in Oxygen-Free Silicon Crystals", Materials Science Forum, Vols. 10-12, pp. 145-150, 1986

Online since:

January 1986

Export:

Price:

$38.00

Fetching data from Crossref.
This may take some time to load.