Distribution of Cobalt in Silicon after Phosphorous Diffusion Gettering

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Periodical:

Materials Science Forum (Volumes 10-12)

Edited by:

H.J. von Bardeleben

Pages:

151-156

DOI:

10.4028/www.scientific.net/MSF.10-12.151

Citation:

R. Kühnapfel et al., "Distribution of Cobalt in Silicon after Phosphorous Diffusion Gettering", Materials Science Forum, Vols. 10-12, pp. 151-156, 1986

Online since:

January 1986

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Price:

$35.00

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