Design and Methodology of Silicon Carbide High Voltage Termination Extension for Small Area BJTs

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Abstract:

An optimized termination extension tutorial is reported for a small area (≈ 1mm2 ) 4H-SiC NPN BJT. The extension system is based on a parametric JTE with isolation rings. Additional aspects such as (1) MESA angle, (2) relieving electric field on the base-drift junction, and (3) blocking the electric field from reaching border structure are investigated. A breakdown voltage greater than 10 kV is recorded, when drift region is n-doped to 8x1014 cm-3.

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[1] M. Locatelli, «Silicon carbide against silicon: a comparison in terms of physical properties, technology and electrical performance of power devices,» Journal de Physique III, EDP Sciences, vol. 1, pp.1101-1110.

DOI: 10.1051/jp3:1993186

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