Impurity Diffusion into GaAs through the SiO2 Protective Layers

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Periodical:

Materials Science Forum (Volumes 117-118)

Edited by:

Tsunemasa Taguchi

Pages:

417-422

DOI:

10.4028/www.scientific.net/MSF.117-118.417

Citation:

D.K. Gautam et al., "Impurity Diffusion into GaAs through the SiO2 Protective Layers ", Materials Science Forum, Vols. 117-118, pp. 417-422, 1993

Online since:

January 1993

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Price:

$35.00

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