Paper Titles
Trial Implementation of Operando PL Spectrum Mapping Using a Mini-Spectrometer in EVC Screening of 4H-SiC Wafers
p.27
Quantitative Analysis of Excess Minority Carrier Density and Critical Duration in UV Irradiation-Based Screening for Bipolar Degradation in 4H-SiC
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Challenges in 1SSF Detection in 4H-SiC Epilayer and Related Failure
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Exploring the Ion Implantation Mechanism for Suppressing Stacking Fault Expansion in 4H-SiC: A Fundamental Approach
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Investigation of Spoke Pattern of Stacking Faults in 4H-SiC Wafers Grown by Physical Vapor Transport Method
p.55
Micropipes in SiC Die Observed by Molten KOH Etching
p.63
Synchrotron X-Ray Topography Analysis of Low Angle Grain Boundaries Induced by Growth Step Flow in PVT-Grown 4H-SiC Crystals
p.69
Polytype Transitions in Silicon Carbide: A Macroscopic View
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Depth-Dependent Suppression of Bipolar Degradation in 4H-SiC Diodes via Proton Implantation and Evaluation of Safe Operating Current Density Range
p.89

Polytype Transitions in Silicon Carbide: A Macroscopic View

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Abstract:

Based on the analysis of the defect formation in silicon carbide polytypes in different semiconductor manufacturing processing steps, device operation and environmental-device interaction it is concluded that external material and energy fluxes are generally able to destabilize the polytype structure. The governing reason is the formation of stacking faults and instabilities of the partial dislocation associated with them. A new ansatz is proposed to describe the structural instabilities using none-equilibrium thermodynamics and the entropy production. A criterial form for polyype transitions is proposed. The developed criterial form is applied to describe observed structural instabilities occur­ring under different external actions.

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Periodical:

Materials Science Forum (Volume 1190)

Pages:

79-87

DOI:

https://doi.org/10.4028/p-k0dpCG

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Cite this paper

Online since:

May 2026

Authors:

Jörg Pezoldt*, Vladislav Kurtash, Frank Neubert

Keywords:

Defect Formation, Device Degradation, Nonequilibriums State, Phase Transition, Polytype Stability, Polytype Transition, Self-Organization, Thermodynamics

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