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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Determination of High Relative Deep Level...

Determination of High Relative Deep Level Concentrations in DLTS

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1553-1558

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1553

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Cite this paper

Online since:

November 1995

Authors:

T.V. Kotereva, A.P. Kasatkin, V. Shmagin

Keywords:

Deep Level Concentration, DLTS

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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