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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Enhanced Diffusion of Impurities into Solids by...

Enhanced Diffusion of Impurities into Solids by Electron Beam Doping

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1607-1612

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1607

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Online since:

November 1995

Authors:

Takao Wada, Hiroshi Fujimoto, Haruho Masuda

Keywords:

Electron Beam Doping, Enhanced Diffusion, Solids

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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