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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Electron Energy Dependennce of Impurity...

Electron Energy Dependennce of Impurity Concentrations in Semiconductors by Electron Beam Doping (Superdiffusion)

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1619-1624

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1619

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Online since:

November 1995

Authors:

Takao Wada, Kazuhiro Yasuda, Hiroshi Fujimoto, Haruho Masuda

Keywords:

Energy Dependence of EBD, Superdiffusion Electron Beam Doping (EBD)

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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