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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Precipitates in Antimony Implanted Silicon

Precipitates in Antimony Implanted Silicon

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1871-1874

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1871

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Online since:

November 1995

Authors:

Yoshio Kikuchi, F. Uesugi, S. Kaszczyszyn, Masataka Kase, M. Yoshida, K. Watanabe, I. Hashimoto

Keywords:

Antimony, Implantation, Precipitation, Silicon, TEM

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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