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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Oxygen Precipitation in CZ Silicon Crystals...

Oxygen Precipitation in CZ Silicon Crystals Contaminated with Iron

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1859-1864

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1859

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Online since:

November 1995

Authors:

J. Jablonski, Bo Shen, Teimuraz Mchedlidze, M. Imai, Koji Sumino

Keywords:

Czochralski Silicon, Iron Impurities, Oxygen Precipitation

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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