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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Donor Centers in Er-Implanted Silicon

Donor Centers in Er-Implanted Silicon

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

1515-1520

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.1515

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Online since:

December 1997

Authors:

Valentin V. Emtsev, Boris A. Andreev, D.S. Poloskin, N.A. Sobolev, Elena I. Shek

Keywords:

Electrical Measurements, Erbium Impurity, Silicon

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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