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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Annealing of Low-Temperature Substitutional Gold...

Annealing of Low-Temperature Substitutional Gold in Silicon: Ring-Diffusion of Substitutional Gold in Silicon

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

1789-1794

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.1789

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Online since:

December 1997

Authors:

Masami Morooka

Keywords:

Gold in Silicon, Impurity Diffusion, Ring Mechanism, Si:Au, Substitutional Impurity

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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