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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263EPR Evidence of Hydrogen-Enhanced Diffusion of...

EPR Evidence of Hydrogen-Enhanced Diffusion of Aluminum in Silicon

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

1777-1782

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.1777

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Online since:

December 1997

Authors:

Yu.V. Gorelkinskii, B.N. Mukashev, H.P. Zeindl

Keywords:

Aluminium Pair, Diffusion, Hydrogen, Interstitial, Magnetic Resonance, Silicon

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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