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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Influence of the Dislocation Loops on the...

Influence of the Dislocation Loops on the Anomalous Diffusion of Fe Implanted into InP

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

1807-1812

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.1807

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Online since:

December 1997

Authors:

Cesare Frigeri, A. Carnera, B. Fraboni, A. Gasparotto, F. Priolo, A. Camporese, G. Rossetto

Keywords:

Diffusion, Dislocation Loops, Fe Anomalous, Fe Implantation, InP

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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