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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Hydrogen Molecules in Crystalline Silicon

Hydrogen Molecules in Crystalline Silicon

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

203-210

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.203

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Online since:

December 1997

Authors:

M. Kitajima, K. Ishioka, K.G. Nakamura, N. Fukata, Kenji Murakami, Jun Kikuchi, S. Fujimura

Keywords:

Crystalline Si, H₂, Hydrogen Atom Treatment, Raman Scattering

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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