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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Low Temperature Hydrogen Diffusion in Silicon:...

Low Temperature Hydrogen Diffusion in Silicon: Influence of Substrate Quality and the Surface Damage

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

191-196

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.191

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Online since:

December 1997

Authors:

M.I. Symko, Bhushan L. Sopori, Robert Reedy, Kim M. Jones

Keywords:

Diffusion, Hydrogen, Passivation, Silicon

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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