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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Growth of High Quality AIN Epitaxial Films by...

Growth of High Quality AIN Epitaxial Films by Hot-Wall Chemical Vapour Deposition

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

1133-1136

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.1133

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Online since:

February 1998

Authors:

Urban Forsberg, Jens Birch, Mike F. MacMillan, P.O.Å. Persson, L. Hultman, Erik Janzén

Keywords:

Hot-Wall CVD, Infrared Reflectance, TEM, Thin Film, X-Ray Diffraction (XRD)

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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