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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Growth of Aluminium Nitride with Superior Optical...

Growth of Aluminium Nitride with Superior Optical and Morphological Properties

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

1137-1140

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.1137

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Cite this paper

Online since:

February 1998

Authors:

K. Wongchotigul, S. Wilson, C. Dickens, X. Tang, Michael G. Spencer

Keywords:

Aluminum Nitride (AlN), Metal Organic Chemical Vapour Deposition

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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