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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Ti/Al and Cr/Al Ohmic Contacts to n-Type GaN...

Ti/Al and Cr/Al Ohmic Contacts to n-Type GaN Formed by Furnace Annealing

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

1407-1410

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.1407

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Online since:

February 1998

Authors:

N. Papanicolaou, Arthur H. Edwards, Mulpuri V. Rao, Jeffrey A. Mittereder, W.T. Anderson

Keywords:

Cr/Al, Furnace Annealing, Low Resistivity, Ohmic Contact, Ti/Al

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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