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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Electrical Characterization of the AlN/Si(111)...

Electrical Characterization of the AlN/Si(111) System

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

1389-1392

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.1389

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Online since:

February 1998

Authors:

Thierry Ouisse, H.P.D. Schenk, S. Karmann, Ute Kaiser

Keywords:

Interface States (or Traps), Metal Insulator Semiconductor Structures, Molecular Beam Epitaxy (MBE), Poole-Frenkel Emission, Scanning Electron Microscope (SEM)

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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