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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Hot-Implantation of Phosphorus Ions into 6H-SiC

Hot-Implantation of Phosphorus Ions into 6H-SiC

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

721-724

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.721

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Online since:

February 1998

Authors:

L. Bouwhuis, Takeshi Ohshima, Hisayoshi Itoh, Y. Aoki, Masahito Yoshikawa, Isamu Nashiyama, Motohiro Iwami

Keywords:

Electron Spin Resonance, Hall-Effect Measurement, Hot Implantation, Phosphorus Donors

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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